We are proud to share that our 2D-PRINTABLE partner from UniBw M published a new article: Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits, featured in ACS Nano.
This article explores the development of high-sensitivity pressure sensors using two-dimensional (2D) platinum diselenide (PtSe₂) films. The study examines three different synthesis methods for PtSe₂ films and establishes a reliable fabrication process for suspended PtSe₂/PMMA membranes over sealed cavities. The resulting sensors demonstrate reproducible sensitivities exceeding 6 × 10–⁴ kPa–1, with sensitivity influenced by membrane diameter and the piezoresistive gauge factor of the PtSe₂ film. By reducing the number of membranes within a device, the area-normalized sensitivity significantly increases, enabling miniaturized, high-performance sensors. This advancement allows for the manufacturing of pressure sensors with high sensitivity while maintaining a much smaller device footprint than current state-of-the-art MEMS (microelectromechanical systems) technology. Additionally, we integrate PtSe₂ pressure sensors with CMOS technology, enhancing the technological readiness of PtSe₂-based micro- and nanoelectromechanical systems (MEMS and NEMS).
We congratulate UniBw M on this remarkable achievement!
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